• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    METHOD OF MANUFACTURING AN AEROSOL FORMING HOLE PLATE SLIDE, HOLE PLATE, AEROSOL FORMING DEVICE AND HOLE PLATE BLADE. A photosensitive material (21) is applied in a pattern of vertical columns having the dimensions of holes or pores of the orifice plate to be produced. This mask pattern provides the holes that define the aerosol particle size, having up to 2,500 holes per square millimeter. There is metal electrodeposition (22) in the spaces around the columns (21). There is an additional application of a second photosensitive mask (25) of much larger columns (wider and taller), covering the area of several first columns (21). The bore diameter in the second galvanizing layer is chosen according to the desired flow rate.
    公开号:BR112014027624B1
    申请号:R112014027624-2
    申请日:2013-05-24
    公开日:2021-01-19
    发明作者:Brendan Hogan
    申请人:Stamford Devices Ltd；
    IPC主号:
    专利说明:

    INTRODUCTION
    [001] The invention relates to the manufacture of orifice plates for aerosol devices (or "nebulizers"). Vibrating orifice plates are used in a wide range of aerosol devices, and are typically supported around their edges by a vibrating support that is vibrated by a piezo element. Also, aerosol devices may have passive or static orifice plates, which operate, for example, by means of an acoustic signal from a horn causing a flow of medication to be filtered through the orifice plate.
    [002] An orifice plate is used for aerosol delivery of liquid formulations delivering a controlled liquid drop size suitable for pulmonary drug delivery. The ideal nebulizer is one that guarantees a consistent and accurate particle size in combination with an output rate that can be varied to deliver the drug to the targeted area as efficiently as possible. Aerosol delivery to the deep lung such as the bronchi and bronchioles regions requires a small, repeatable particle size typically in the range of 2 μm - 4 μm. In general, outputs greater than 1 mL / min are required.
    [003] Currently, orifice plates are produced using a variety of different devices, including electroplating and laser drilling. Electroplating in general is the most advantageous method of production from a technical and economic point of view. US 6,235,177 (Aerogen) describes an electroplating based approach, in which a sheet material is built into a mandrel by means of an electroplating process where the liquefied metals in the galvanizing bath (typically palladium and nickel) are transferred from liquid form to the solid form on the slide. Material is transferred to the conduction surface on the mandrel and not to the photosensitive areas that are non-conductive. Areas are masked with non-conductive photosensitive material where metallic development is not required, see figure 1. Upon completion of the galvanizing process, the mandrel / blade assembly is removed from the bath and the blade is detached from the mandrel for subsequent processing to a plate of holes.
    [004] However, a problem with this approach is that the hole size is dependent on the galvanizing time and the resulting blade thickness. The process can be difficult to control, and if not perfectly controlled some holes may be almost closed or blocked as shown in figure 2, or too large as shown in figure 3, and there may be out of tolerance variation in the hole sizes. Also, there are limitations on the number of holes per unit area. Additionally, with this technology, an increase in output rate usually requires an increase in particle size, which in general may not be desired. It is more desirable to increase the output rate without increasing the particle size.
    [005] Precision combinations of hole size and number of holes per unit area can be a significant determinant in the rate of nebulizer output and resulting particle size distribution.
    [006] WO2011 / 139233 (Agency for Science, Technology and Research) describes a micro-sieve made using SU8 material with photo-masking.
    [007] US4844778 (Stork Veco) describes fabrication of a membrane to separate media, and a separation device incorporating a membrane like this. The manufacturing method includes a two-step photolithographic procedure.
    [008] EP1199382 (Citizem Watch Co. Ltd.) describes a production method for a hole structure in which there is exposure to light sensitive material in multiple cycles to provide deeper tapered holes towards the top because there is exposure through the first holes.
    [009] The invention is concerned with providing an improved method for manufacturing an orifice plate for a nebulizer to solve the problems mentioned above. SUMMARY OF THE INVENTION
    [010] According to the invention, a method of making an aerosol-forming orifice plate blade is provided, the method comprising: providing a conductive material mandrel; apply a mask over the mandrel in a column pattern; electroplating the spaces around the columns; removing the mask to provide a sheet of electroplated material with aerosol-forming holes where the mask columns were; wherein said masking and galvanizing steps are followed by at least one subsequent masking and galvanizing cycle to increase the thickness of the blade; where the at least one subsequent cycle raises the total blade thickness to a desired level according to criteria for removing the mandrel blade, and / or the desired frequency of operation of the orifice plate, and / or physical restrictions of a drive aerosol; wherein the at least one subsequent cycle provides: spaces, at least some of which are placed over a plurality of aerosol-forming holes; and a galvanizing material that blocks some of the aerosol forming holes; and wherein the at least one subsequent cycle is performed according to the desired flow rate through the orifice plate.
    [011] All masks from all cycles can be removed together in some modalities, however, in other modalities the mask from one cycle can be removed before the subsequent masking and galvanizing cycle, and if so it is more likely that subsequent galvanizing at least partially fill some of the bottom holes.
    [012] In one embodiment, the columns have a depth in the range of 5 μm to 40 μm, and preferably 15 μm to 25 μm. In some embodiments, the columns have a width dimension in the mandrel plane in the range of 1 μm to 10 μm, preferably from 2 μm to 6 μm.
    [013] In one embodiment, electroplating is continued until the galvanized material is substantially level with the tops of the columns.
    [014] In one embodiment, there is substantially no overlap between the galvanized material and the masking material. In one embodiment, the at least one subsequent cycle raises the total blade thickness to above 50 μm, and preferably more than 58 μm. In one embodiment, the extent of occlusion in the subsequent cycle or in each of them is chosen considering the desired mechanical properties of the orifice plate.
    [015] In one embodiment, the first masking and galvanizing are performed in such a way that the aerosol-forming holes are created with a funnel shape.
    [016] In one embodiment, subsequent masking and galvanizing are performed in such a way that the overlap spaces are created with a funnel shape.
    [017] In one embodiment, the galvanized metal includes Ni and / or Pd. In one embodiment, Ni and / or Pd are present on a surface at a concentration chosen considering anti-corrosion properties. In one embodiment, the proportion of Pd is in the range of 85% by weight and 93% by weight, and preferably around 89%, the remainder being substantially Ni. In one embodiment, the galvanized material includes Ag and / or Cu on a surface, in a concentration chosen considering antibacterial properties.
    [018] In one embodiment, the method further comprises the steps of further processing the blade to provide an orifice plate ready to fit into an aerosol forming device. In one embodiment, the blade is realized as a non-flat hole plate. In one embodiment, the blade is realized in a shape with a configuration chosen according to the desired spray angles. In one embodiment, the blade is realized in a form having a dome-shaped operating part and a flange to engage with a drive. In one embodiment, the sheet is annealed before it is formed.
    [019] In another aspect the invention provides an orifice plate blade comprising a metal body formed always with a method as previously defined in any embodiment.
    [020] In a further aspect the invention provides an orifice plate formed always by means of a method as defined previously in any modality.
    [021] In another aspect, the invention provides an orifice plate blade comprising a lower layer of galvanized metal and photolithography with through holes for aerosol formation and at least one upper layer of galvanized metal and photolithography having spaces, in that said spaces are placed over a plurality of aerosol-forming through holes, wherein the size and number of aerosol-forming holes per large hole are related to a desired aerosol flow rate.
    [022] In one embodiment, the top layer blocks some of the holes in the bottom layer.
    [023] In one modality, the metal of all layers is the same.
    [024] In one embodiment, the galvanized metal includes Ni and / or Pd. In one embodiment, Ni and / or Pd are present on a surface at a concentration chosen considering anti-corrosion properties.
    [025] In one embodiment, the proportion of Pd is in the range of 85% by weight and 93% by weight, and preferably around 89%, the remainder being substantially Ni. In one embodiment, the galvanized metal includes Ag and / or Cu on a surface, in a concentration chosen considering antibacterial properties.
    [026] In another aspect, the invention provides an orifice plate including a blade as defined above in any embodiment.
    [027] In another aspect, the invention provides an aerosol forming device comprising an orifice plate as defined previously in any embodiment, and a drive engaging with the plate to vibrate it at a desired frequency to form an aerosol.
    [028] In another aspect, the invention provides an aerosol forming device comprising an orifice plate as defined above in any embodiment, a support for the orifice plate for use of passive orifice plate, and a horn arranged for force a wave of liquid through the orifice plate. DETAILED DESCRIPTION OF THE INVENTION
    [029] The invention will be understood more clearly from the description below of some of its modalities, given only by way of example with reference to the accompanying drawings in which: Figures 1 to 3 are cross-sectional diagrams outlining a prior art process as previously described; figures 4 (a) and 4 (b) are cross-sectional views showing masking and galvanizing steps for a first stage of the method, and figure 5 is a plan view of part of the blade for this stage; figures 6 (a) and 6 (b) are cross-sectional views showing a second stage of masking and galvanizing, and figure 7 is a plan view; figure 8 is a cross-sectional view after removal of photosensitive material; figure 9 shows the blade after puncturing to create the shape of a final hole plate; Figure 10 is a graph of particle size versus flow rate to illustrate operation of the orifice plate; figures 11 (a), 11 (b) and 12 are views equivalent to figures 4 (a), 4 (b), and 5 for a second embodiment, in which the holes are tapered; and figures 13 (a) and 13 (b) are views equivalent to figures 6 (a) and 6 (b), and for the second embodiment, and figure 14 is a plan view in the region of a large upper hole after removal of the photosensitive mask.
    [030] Referring to figure 4 (a) a mandrel 20 has a photosensitive material 21 applied in a pattern of vertical columns having the dimensions of the holes or pores of the orifice plate to be produced. The column height is preferably in the range of 5 μm to 40 μm in height, and more preferably from 5 μm to 30 μm, and much more preferably from 15 μm to 25 μm. The diameter is preferably in the range of 1 μm to 10 μm, and more preferably about 2 μm to 6 μm in diameter. This mask pattern provides the holes that define the aerosol particle size. They are much larger in number per unit area when compared to the prior art; a twenty-fold increase is possible, thus having up to 2,500 holes per square millimeter.
    [031] Referring to figures 4 (b) and 5, there is electrodeposition of metal 22 in the spaces around columns 21.
    [032] As shown in figure 6 (a) there is an additional application of a second photosensitive mask 25, with much larger columns (wider and taller), covering the area of several first columns 21. The hole diameter in the second layer galvanizing range is between 20 μm and 400 μm and more preferably between 40 μm and 150 μm. To ensure higher flow rates this diameter is produced at the upper end of the strip, and to ensure lower flow rates it is produced at the lower end of the strip to close more of the smaller openings in the first layer.
    [033] Referring to figures 6 (b) and 7, the spaces around the photosensitive material 25 are galvanized to provide a blade body 26 in the mandrel 20. When the photosensitive material 21 and 25 is eliminated with a photosensitive material remover the galvanized material 22 and 26 is in the form of a blank or mask of orifice plate 30, as shown in figure 8, with the large upper holes 32 and the small lower holes 33. In this embodiment all the photosensitive material 21 and 25 is removed together, however, it is considered that the photosensitive material 21 can be removed prior to the subsequent masking and galvanizing cycle. In this case, the subsequent galvanization is more likely to at least partially fill some of the aerosol-forming holes again.
    [034] As shown in figure 9 the blade 30 is punctured to a disk and is realized in a dome shape to provide a final product orifice plate 40.
    [035] At this stage, the dome diameter can be selected to provide a desired spray angle and / or to establish the ideal natural frequency for the drive controller. The dome shape provides a convergence effect, and the particular shape of the domed plate affects the spray characteristics.
    [036] In an alternative embodiment, the orifice plate is not curved, but is left flat, suitable for use in a device such as a passive plate nebulizer. In this type of nebulizer, a sonotrode or horn is placed in contact with the medication on the plate. A piezo element causes rapid movement of the transducer horn, which forces a wave of medication against the orifice plate causing a flow of medication to be filtered through the plate to the outlet side like an aerosol.
    [037] Most of the benefits of orifice plate fabrication of the invention are applicable for vibrating or passive devices.
    [038] In more detail, the mandrel 20 is coated with photosensitive material 21 with a height and column width equal to the dimensions of the target hole. This subsequent coating and development of subsequent ultraviolet (UV) are such that the columns 21 of photosensitive material are left to remain on the mandrel 20. These columns have the required diameter and are as high as their stiffness can withstand. As the columns only have diameters less than 10 μm, and preferably less than 6 μm, it is possible to obtain many more columns and resulting holes per unit area than in the prior art. It is assumed that there may be up to twenty times more holes than in the prior art electroplating approach. This creates the potential for a substantial increase in the proportion of open area and resulting nebulizer output.
    [039] The mandrel 20 with the photosensitive material developed selectively in the form of the standing columns 21 is then placed in the galvanizing bath and the electrodeposition process containing the metals palladium and nickel (PdNi) in liquid form is typically then applied to the surface. The galvanizing activity is interrupted when the height of the columns is reached. Excessive plating is not allowed as the plating is interrupted just when it reaches the height of the photosensitive material columns. The galvanizing solution is chosen to satisfy the desired hole plate dimensions and operating parameters such as vibration frequency. The proportion of Pd can be in the range of about 85% to 93% by weight, and in one embodiment it is about 89% by weight, the remainder being substantially all Ni. The galvanized structure preferably has a microstructure of fine equiaxial grains at random, with a grain size of 0.2 μm to 2.0 μm, for example. Those skilled in the electroplating technique will realize how galvanizing conditions for both galvanizing stages can be chosen to satisfy the circumstances, and the total contents of the documents indicated below are incorporated into this document by reference: US4628165, US6235117, US2007023547, US2001013554 WO2009 / 042187, and Lu SY, Li JF, Zhou YH, "Grain refinement in the solidification of undercooled Ni-Pd alloys". Journal of Crystal Growth 309 (2007) 103-111, September 14, 2007. In general, many electroplating solutions involving palladium and nickel would produce an effect or nickel only or in fact phosphorous and nickel (14:86) or platinum. It is possible that a non-palladium sheet can be galvanized on the surface (0.5 μm to 5.0 μm thick, preferably 1.0 μm to 3.0 μm thick) in PdNi to transmit more resistance to corrosion. This would also reduce the size of holes if smaller openings were desired.
    [040] When removed from the plating bath, the blade thickness is typically 5 μm - 40 μm depending on the height of the columns. Peeling the blade at this point would produce a very thin blade compared to the standard 60 μm thick of the prior art. A blade of this thickness would be devoid of rigidity, would be very difficult to process, and would require complex and expensive changes to the mechanical manufacture of the nebulizer core to achieve a natural frequency equivalent to that of the state of the art in such a way that the existing electronic control triggers could be usable, which in some cases are integrated with fans. Using a different drive controller would be a significant economic barrier to market acceptance because of the costs involved.
    [041] This problem is overcome by offering the galvanized mandrel for the second process of depositing photosensitive material. In one embodiment, the thickness of the photosensitive material is set to a depth equal to that required to bring the total blade thickness to approximately 60 μm (similar to the prior art blade thickness). The second mask height is preferably in the range of 40 μm - 50 μm for many applications. It is then developed to allow larger columns to remain standing on the galvanized surface. These typically have a diameter between 40 - 100 μm, but can be larger or smaller. The additional height of the second plating helps in removing the mandrel, but importantly it also reaches a particular thickness that is equivalent to that of the prior art orifice plate to allow the final product orifice plate 40 to be electrically driven by controllers on the market. This creates a natural frequency match to achieve correct vibration to generate an aerosol. In general, the second stage of galvanization provides a more suitable thickness for the application of nebulizer with respect to rigidity, flexibility and flexural strength. Another aspect is that it blocks some of the smaller holes, thereby achieving improved control over flow rate. Consequently, the second stage of masking and galvanizing can be used to “adjust” the end product orifice plate according to the desired flow rate. Also, it can be changed quickly between small batches to enable a wide range of differently adjusted plates.
    [042] The blade is then carefully detached from the substrate without the aid of any subsequent processes such as corrosion or laser cutting. This peeling facility has the advantages of not transmitting additional mechanical stresses to an already fragile blade. The slide is then washed and rinsed in a photosensitive material remover before the metrology inspection.
    [043] In the blank or mask of the orifice plate 30, the holes 33 have a depth equal to that of the first galvanizing layer and the thickness of the final sheet will be equal to the sum of both galvanizing layers, see figures 8 and 9. It is then ready for annealing, puncturing and folding to form the vibrating plate 40 shown in figure 9.
    [044] There may be additional steps to improve the membrane properties for certain applications. For example, the membrane may be of an electroformed Ni substrate material that is overcoated with corrosion resistant materials such as copper, silver, palladium, platinum and / or PdNi alloys. Copper and silver advantageously have properties resistant to bacteria.
    [045] It will be appreciated that the invention provides an orifice plate having a first layer of electroformed metal with a plurality of aerosol-forming through holes that define the droplet size being ejected and a second top layer of similar or different electroformed material with holes or spaces with larger diameters above the aerosol forming holes and whose galvanizing material obstructs some of the first layer holes.
    [046] In several modalities, the second layer has several holes or spaces with diameters chosen in such a way that a predetermined number of holes in the first layer of formation of droplet size is exposed, which determines the number of active holes and defines thus the amount of liquid being sprayed per unit time.
    [047] The size and number of holes in both layers can be varied independently to achieve the desired ranges of droplet size and flow rate distribution, which is not possible with the prior art defined galvanizing technology.
    [048] It should also be noted that the invention provides the potential for a much larger number of holes per unit area when compared to the prior art. For example, an increase of twenty times is possible, thus having up to 2,500 holes per square millimeter.
    [049] Also, in various modalities the second layer completely or partially fills at least some of the aerosol-forming holes in the first layer, thus forming mechanical anchoring for both layers to help achieve tough life requirements.
    [050] The following is a table of examples of different hole configurations for 5 mm diameter orifice plates (“PO”):

    [051] Advantageous aspects of the invention include: (i) a larger number of holes per unit area is possible; (ii) smaller and more accurate hole sizes diametrically are possible; (iii) thickness similar to that of commercially available blades, which alleviates the costly need to redesign the nebulizer to match the correct frequency for the existing controllers to activate the aerosol generator; (iv) only two layers of galvanizing or galvanizing steps are required; (v) it is also easy to carefully detach the blade from the mandrel substrate; (vi) possibility of using existing electronic controllers to drive the orifice plate since the natural frequencies are matched, having reached a similar orifice plate thickness; (vii) possibility of obtaining smaller and more controllable particle sizes (2 μm - 4 μm); (viii) possibility of achieving higher flow rates (0.5 mL / min to 2.5 mL / min, more typically 0.75 mL / min - 1.5 mL / min); (ix) possibility of achieving flow rates and particle size more independent of each other when compared to the prior art as described. (Typically in the prior art, increasing flow rate usually requires increasing particle size and vice versa). These advantages are illustrated in the graph in figure 10.
    [052] Referring to figures 11 to 14 in a second mode, the processing is very similar to that of the previously mentioned mode. In this case, however, both sets of photosensitive material columns are tapered in such a way that the resulting holes are tapered for improved aerosol liquid flow. There is a mandrel 50, the first masking columns 51 and the plating 52 between them. The second mask comprises the tapered columns 55, and the spaces between them are galvanized with metal 56. Greater care is required for the galvanizing steps to ensure that there is adequate galvanizing under the mask projections. Figure 14 shows a plan view, in this case after removal of the photosensitive material. It can be seen that there are several small holes 61 for each large upper hole 65 in the body of PdNi 56/52. The upper hole 65 has the effect of a downward funnel for the small holes 61, which themselves are in the form of a funnel.
    [053] The invention is not limited to the described modalities, and can be varied in construction and detail. For example, it is considered that the second masking and galvanizing cycle may not be required if the blade can be removed from the mandrel, either because the required blade depth is reached in the first stage or because of improved blade removal technologies being available. In addition, a third layer can be applied to provide more mechanical rigidity for the orifice plate. Also, in the modalities described above, the layers are of the same metal. However, it is considered that they may be different, and in fact the metal within each hole-forming layer may include different metal sublayers. For example, the composition on one or both surfaces may be different for greater resistance to corrosion and / or for certain hydrophilic or hydrophobic properties. Also, there may be an additional galvanizing step for the upper surface layer from 1 μm to 5 μm or from 1 μm to 3 μm.
    权利要求:
    Claims (18)
    [0001]
    1. Method of making an aerosol-forming orifice plate blade (30), the method characterized by the fact that it comprises: supplying a mandrel (20) of conductive material, applying a mask over the mandrel in a column pattern ( 21) said columns having a width dimension in the mandrel plane in the range of 1 μm to 10 μm, electroplating (22) the spaces around the columns, in which the electroplating is continued until the galvanized material is level with the tops of the columns and there is no overlap between the galvanized material and the mask material, remove the mask to provide a sheet of electroplated material with aerosol forming holes where the mask columns were, in which said masking and galvanizing steps are followed for at least one subsequent masking (25) and galvanizing (26) cycle to increase the blade thickness, where at least one subsequent cycle raises the total blade thickness (3 0) to a desired level according to criteria for removing the mandrel blade, and / or the desired frequency of operation of the orifice plate, and / or physical restrictions of an aerosol actuation, and removing the mandrel blade; wherein the at least one subsequent cycle provides after mask removal: spaces (32), at least some of which are placed over a plurality of aerosol forming holes (33), and having a diameter in the range of 20 μm and 400 μm, and a plating material (31) that blocks some of the aerosol forming holes (33), and where the at least subsequent cycle is performed according to the desired flow rate through the orifice plate, where a number of spaces with diameters are chosen so as to expose a predetermined number of aerosol-forming holes.
    [0002]
    2. Method, according to claim 1, characterized by the fact that the columns (21) have a depth in the range of 5 μm to 40 μm.
    [0003]
    3. Method according to claim 1 or 2, characterized by the fact that the columns (21) have a width dimension in the mandrel plane in the range of 2 μm to 6 μm.
    [0004]
    Method according to any one of claims 1 to 3, characterized by the fact that at least one subsequent cycle raises the total blade thickness to a value in the range of 45 μm to 90 μm.
    [0005]
    Method according to any one of claims 1 to 4, characterized in that the extent of occlusion in the subsequent cycle or in each one of them is chosen considering the desired mechanical properties of the orifice plate.
    [0006]
    Method according to any one of claims 1 to 5, characterized in that the first masking and galvanizing are carried out in such a way that the aerosol forming holes (51) are created with a funnel shape.
    [0007]
    Method according to any one of claims 1 to 6, characterized in that the subsequent masking and galvanizing are carried out in such a way that the overlapping spaces (55) are created with a funnel shape.
    [0008]
    8. Method according to any one of claims 1 to 7, characterized by the fact that the galvanized metal includes Ni and / or Pd, and that Ni and Pd are present on a surface at a concentration chosen considering anti-corrosion properties, and where the proportion of Pd is in the range of 85% by weight and 93% by weight, preferably 89%, the remainder being Ni.
    [0009]
    Method according to any one of claims 1 to 8, characterized by the fact that the galvanized material includes Ag and / or Cu on a surface, in a concentration chosen considering antibacterial properties.
    [0010]
    Method according to any one of claims 1 to 9, characterized in that it comprises the additional steps of further processing the blade to provide an orifice plate (40) ready to fit in an aerosol forming device and in that the blade is realized as a non-planar orifice plate (40), and that the blade is realized in a shape with a configuration chosen according to the desired spray angles, and in which the blade is realized in a shape having a dome-shaped operating part and a flange to engage with a drive.
    [0011]
    11. Orifice plate blade (30), obtained by the method as defined in claims 1 to 10, characterized by the fact that it comprises a lower layer (31) of photolithography galvanized metal with aerosol forming holes (33) and the at least one top layer of galvanized metal (31) having spaces (32), wherein said spaces are placed over a plurality of aerosol forming holes (33), wherein the upper layer obstructs some of the aerosol forming holes in the bottom layer, the aerosol forming holes have a width dimension in the range of 1 μm to 10 μm, and the spaces have a diameter in the range of 20 μm to 400 μm, and in which several spaces with diameters are chosen, in order to that a predetermined number of aerosol forming holes is exposed according to the desired flow rate through the opening plate.
    [0012]
    12. Orifice plate blade according to claim 11, characterized by the fact that the metal of all layers is the same.
    [0013]
    13. Orifice plate blade according to either of claims 11 or 12, characterized in that the galvanized metal includes Ni and / or Pd, and in which Ni and / or Pd are present on a surface at a chosen concentration considering anti-corrosion properties and in which the proportion of Pd is in the range of 85% by weight and 93% by weight, and preferably 89%, the remainder being Ni.
    [0014]
    Orifice plate blade according to any one of claims 11 to 13, characterized by the fact that the galvanized metal includes Ag and / or Cu on a surface, in a concentration chosen for antibacterial properties.
    [0015]
    15. Orifice plate blade according to any one of claims 11 to 14, characterized in that the aerosol forming holes have a width dimension in the range of 2 μm to 6 μm and that the thickness of the blade is in the range of 45 μm to 90 μm.
    [0016]
    16. Orifice plate, characterized by the fact that it includes a blade as defined in any one of claims 11 to 15.
    [0017]
    17. Aerosol forming device, characterized in that it comprises an orifice plate as defined in claim 16, and a drive engaging with the plate to vibrate it at a desired frequency to form an aerosol.
    [0018]
    18. Aerosol forming device, characterized by the fact that it comprises an orifice plate as defined in claim 16, a support for the orifice plate for use of passive orifice plate, and a horn arranged to force a wave of liquid through the orifice plate.
    类似技术:
    公开号 | 公开日 | 专利标题
    BR112014027624B1|2021-01-19|method of making an aerosol forming orifice plate blade, orifice plate, aerosol forming device and orifice plate blade
    US6235177B1|2001-05-22|Method for the construction of an aperture plate for dispensing liquid droplets
    EP1681375B1|2010-08-25|Electroforming mold and method for manufacturing the same, and method for manufacturing electroformed component
    CN103415398A|2013-11-27|Photodefined aperture plate and method for producing the same
    US20190210044A1|2019-07-11|Method for producing an aperture plate
    US20170136485A1|2017-05-18|Aerosol generators
    EP2794964B1|2016-03-02|Aerosol generators
    EP2607524B1|2014-09-10|Aerosol generators
    US9889261B2|2018-02-13|Nebulizer mesh and production method thereof
    EP2947181B1|2017-02-22|A method for producing an aperture plate
    KR20190001261A|2019-01-04|Method of inducing vertical groth in electroforming
    同族专利:
    公开号 | 公开日
    WO2013186031A2|2013-12-19|
    HK1205771A1|2015-12-24|
    US10512736B2|2019-12-24|
    JP6385922B2|2018-09-05|
    EP3476982A1|2019-05-01|
    RU2014145313A|2016-07-27|
    US20150101596A1|2015-04-16|
    JP2018158150A|2018-10-11|
    JP2020096900A|2020-06-25|
    EP2859137A2|2015-04-15|
    JP2015527481A|2015-09-17|
    US9981090B2|2018-05-29|
    EP2859137B1|2018-12-05|
    RU2637737C2|2017-12-06|
    CN104350182A|2015-02-11|
    JP6835991B2|2021-02-24|
    WO2013186031A3|2014-07-24|
    US20200078536A1|2020-03-12|
    CN104350182B|2020-04-21|
    US20130334338A1|2013-12-19|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    US2226706A|1937-11-29|1940-12-31|Hazeltine Corp|Periodic wave-generating system|
    US3130487A|1962-12-17|1964-04-28|Norman B Mears|Method of making fine mesh dome-shaped grids|
    US3325319A|1963-12-18|1967-06-13|Buckbee Mears Co|Process for etching arcuately shaped metal sheets|
    DE2050285C3|1970-10-13|1974-03-21|Siemens Ag, 1000 Berlin Und 8000 Muenchen|Process for the production of screen printing stencils made of metal|
    US4184925A|1977-12-19|1980-01-22|The Mead Corporation|Solid metal orifice plate for a jet drop recorder|
    US4430784A|1980-02-22|1984-02-14|Celanese Corporation|Manufacturing process for orifice nozzle devices for ink jet printing apparati|
    US4379737A|1981-11-18|1983-04-12|Armstrong World Industries, Inc.|Method to make a built up area rotary printing screen|
    US4628165A|1985-09-11|1986-12-09|Learonal, Inc.|Electrical contacts and methods of making contacts by electrodeposition|
    US4849303A|1986-07-01|1989-07-18|E. I. Du Pont De Nemours And Company|Alloy coatings for electrical contacts|
    US4773971A|1986-10-30|1988-09-27|Hewlett-Packard Company|Thin film mandrel|
    NL8603278A|1986-12-23|1988-07-18|Stork Veco Bv|MEMBRANE WITH PERFORATIONS AND METHOD FOR MANUFACTURING SUCH MEMBRANE.|
    US4839001A|1988-03-16|1989-06-13|Dynamics Research Corporation|Orifice plate and method of fabrication|
    US4972204A|1989-08-21|1990-11-20|Eastman Kodak Company|Laminate, electroformed ink jet orifice plate construction|
    DE3928832C2|1989-08-31|1995-04-20|Blasberg Oberflaechentech|Process for the production of plated-through printed circuit boards and semi-finished printed circuit boards|
    US5152456A|1989-12-12|1992-10-06|Bespak, Plc|Dispensing apparatus having a perforate outlet member and a vibrating device|
    JP2992645B2|1990-11-19|1999-12-20|九州日立マクセル株式会社|Method for producing electroformed product having through-hole|
    US5487378A|1990-12-17|1996-01-30|Minnesota Mining And Manufacturing Company|Inhaler|
    JP2723690B2|1991-04-22|1998-03-09|耕司 戸田|Ultrasonic color organ|
    US5164740A|1991-04-24|1992-11-17|Yehuda Ivri|High frequency printing mechanism|
    US6629646B1|1991-04-24|2003-10-07|Aerogen, Inc.|Droplet ejector with oscillating tapered aperture|
    US6205999B1|1995-04-05|2001-03-27|Aerogen, Inc.|Methods and apparatus for storing chemical compounds in a portable inhaler|
    JPH05177834A|1991-06-04|1993-07-20|Seiko Epson Corp|Ink jet recording head|
    US5180482A|1991-07-22|1993-01-19|At&T Bell Laboratories|Thermal annealing of palladium alloys|
    JPH0574669A|1991-09-18|1993-03-26|Rohm Co Ltd|Manufacture of semiconductor device|
    JP3200923B2|1992-03-02|2001-08-20|株式会社村田製作所|Electroforming method|
    JP2544634Y2|1992-03-10|1997-08-20|ティーディーケイ株式会社|Ultrasonic atomizer|
    JPH07329304A|1994-04-11|1995-12-19|Fujitsu Ltd|Ink jet recorder, nozzle plate for recording head and manufacture of nozzle plate|
    US5565113A|1994-05-18|1996-10-15|Xerox Corporation|Lithographically defined ejection units|
    US5443713A|1994-11-08|1995-08-22|Hewlett-Packard Corporation|Thin-film structure method of fabrication|
    US5560837A|1994-11-08|1996-10-01|Hewlett-Packard Company|Method of making ink-jet component|
    US5685491A|1995-01-11|1997-11-11|Amtx, Inc.|Electroformed multilayer spray director and a process for the preparation thereof|
    WO1996030643A1|1995-03-29|1996-10-03|Robert Bosch Gmbh|Perforated disc, especially for injection valves|
    US5924634A|1995-03-29|1999-07-20|Robert Bosch Gmbh|Orifice plate, in particular for injection valves, and method for manufacturing an orifice plate|
    CN1149907A|1995-03-29|1997-05-14|罗伯特·博施有限公司|Process for producing perforated disk|
    AU5066996A|1995-04-14|1996-10-24|Canon Kabushiki Kaisha|Method for producing liquid ejecting head and liquid ejecting head obtained by the same method|
    DE19527846A1|1995-07-29|1997-01-30|Bosch Gmbh Robert|Valve, in particular fuel injector|
    US5837960A|1995-08-14|1998-11-17|The Regents Of The University Of California|Laser production of articles from powders|
    US5758637A|1995-08-31|1998-06-02|Aerogen, Inc.|Liquid dispensing apparatus and methods|
    US5586550A|1995-08-31|1996-12-24|Fluid Propulsion Technologies, Inc.|Apparatus and methods for the delivery of therapeutic liquids to the respiratory system|
    DE19639506A1|1996-09-26|1998-04-02|Bosch Gmbh Robert|Perforated disc and valve with a perforated disc|
    JP3934723B2|1997-02-13|2007-06-20|株式会社オプトニクス精密|Metal mask manufacturing method|
    EP0939858B1|1997-09-16|2004-04-28|Robert Bosch Gmbh|Perforated disk or atomizing disk and an injection valve with a perforated disk or atomizing disk|
    JPH11138827A|1997-11-10|1999-05-25|Citizen Watch Co Ltd|Manufacture for minute part|
    US6235117B1|1998-11-06|2001-05-22|Eamon P. McDonald|Squeegee roll for thin sheet handling system|
    US6310641B1|1999-06-11|2001-10-30|Lexmark International, Inc.|Integrated nozzle plate for an inkjet print head formed using a photolithographic method|
    US6235177B1|1999-09-09|2001-05-22|Aerogen, Inc.|Method for the construction of an aperture plate for dispensing liquid droplets|
    US6357677B1|1999-10-13|2002-03-19|Siemens Automotive Corporation|Fuel injection valve with multiple nozzle plates|
    MXPA01008017A|1999-12-08|2002-04-24|Baxter Int|Microporous filter membrane, method of making microporous filter membrane and separator employing microporous filter membranes.|
    KR100421774B1|1999-12-16|2004-03-10|앰코 테크놀로지 코리아 주식회사|semiconductor package and its manufacturing method|
    EP1199382A4|2000-03-22|2006-10-11|Citizen Watch Co Ltd|Hole structure and production method for hole structure|
    JP4527250B2|2000-07-10|2010-08-18|九州日立マクセル株式会社|Nozzle body manufacturing method|
    US6586112B1|2000-08-01|2003-07-01|Hewlett-Packard Company|Mandrel and orifice plates electroformed using the same|
    JP3751523B2|2000-11-30|2006-03-01|三菱電機株式会社|Droplet discharge device|
    JP4671255B2|2000-12-20|2011-04-13|九州日立マクセル株式会社|Method for producing electroformed metal mask|
    JP2002289097A|2001-03-23|2002-10-04|Sumitomo Metal Mining Co Ltd|Method of manufacturing aperture grill|
    EP1474196B1|2002-01-15|2016-08-17|Novartis AG|Methods and systems for operating an aerosol generator|
    US7259640B2|2001-12-03|2007-08-21|Microfabrica|Miniature RF and microwave components and methods for fabricating such components|
    TW589253B|2002-02-01|2004-06-01|Nanodynamics Inc|Method for producing nozzle plate of ink-jet print head by photolithography|
    US8245708B2|2002-05-07|2012-08-21|The Research Foundation Of State University Of New York|Methods, devices and formulations for targeted endobronchial therapy|
    KR100510124B1|2002-06-17|2005-08-25|삼성전자주식회사|manufacturing method of ink jet print head|
    JP2004290426A|2003-03-27|2004-10-21|Mitsubishi Materials Corp|Mesh for ultrasonic wave type inhalator|
    JP2006056151A|2004-08-20|2006-03-02|Alps Electric Co Ltd|Solder paste printing device|
    KR100624692B1|2004-09-13|2006-09-15|삼성전자주식회사|filter plate for ink jet head, ink jet head including the filter plate, and method of fabricating the filter plate|
    JP3723201B1|2004-10-18|2005-12-07|独立行政法人食品総合研究所|Method for producing microsphere using metal substrate having through hole|
    US7097776B2|2004-10-22|2006-08-29|Hewlett-Packard Development Company, L.P.|Method of fabricating microneedles|
    US7104475B2|2004-11-05|2006-09-12|Visteon Global Technologies, Inc.|Low pressure fuel injector nozzle|
    US7501228B2|2005-03-10|2009-03-10|Eastman Kodak Company|Annular nozzle structure for high density inkjet printheads|
    JP2006297688A|2005-04-19|2006-11-02|Matsushita Electric Ind Co Ltd|Method of manufacturing nozzle plate, nozzle plate made by using the method of manufacturing nozzle plate, and ink jet head using the nozzle plate|
    JP4689340B2|2005-05-02|2011-05-25|キヤノン株式会社|Liquid pharmaceutical composition for discharge|
    JP5064383B2|2005-05-25|2012-10-31|エアロジェン，インコーポレイテッド|Vibration system and method|
    JP2007245364A|2006-03-13|2007-09-27|Fujifilm Corp|Method for manufacturing nozzle plate, liquid droplet delivering head and image forming apparatus|
    EP1835050A1|2006-03-15|2007-09-19|Doniar S.A.|Process for the fabrication of LIGA-UV multilayer metallic structures, the layers being adjacent and not completely superimposed, and structure therefrom.|
    US8991389B2|2006-04-20|2015-03-31|Ric Investments, Llc|Drug solution level sensor for an ultrasonic nebulizer|
    US20080023572A1|2006-07-28|2008-01-31|Nalux Co., Ltd.|Porous plate with micro openings, method of producing the same, and atomizer having the same|
    JP2010540526A|2007-09-25|2010-12-24|ノバルティスアーゲー|Treatment of lung injury with drugs such as aerosolized vancomycin|
    JP2009195669A|2008-01-25|2009-09-03|Canon Inc|Medicine ejection apparatus and control method thereof|
    US20100055045A1|2008-02-26|2010-03-04|William Gerhart|Method and system for the treatment of chronic obstructive pulmonary disease with nebulized anticholinergic administrations|
    WO2010011329A2|2008-07-23|2010-01-28|Map Pharmaceuticals, Inc.|The delivery of powdered drug via inhalation|
    ITTO20080980A1|2008-12-23|2010-06-24|St Microelectronics Srl|PROCESS OF MANUFACTURING OF AN MEMBRANE OF NOZZLES INTEGRATED IN MEMS TECHNOLOGY FOR A NEBULIZATION DEVICE AND A NEBULIZATION DEVICE THAT USES THIS MEMBRANE|
    US7938522B2|2009-05-19|2011-05-10|Eastman Kodak Company|Printhead with porous catcher|
    US20110000481A1|2009-07-01|2011-01-06|Anand Gumaste|Nebulizer for infants and respiratory compromised patients|
    US10265478B2|2009-09-30|2019-04-23|Sanofi-Aventis Deutschland Gmbh|Injection device|
    JP5759480B2|2010-01-11|2015-08-05|コーニンクレッカ フィリップス エヌ ヴェ|Magnetic coupling for aerosol generators|
    SG185113A1|2010-05-04|2012-12-28|Agency Science Tech & Res|A microsieve for cells and particles filtration|
    WO2012078589A1|2010-12-07|2012-06-14|Technic Inc.|Electro-depositing metal layers of uniform thickness|
    US9719184B2|2010-12-28|2017-08-01|Stamford Devices Ltd.|Photodefined aperture plate and method for producing the same|
    CN104350182B|2012-06-11|2020-04-21|斯坦福设备有限公司|Method for producing an orifice plate for a nebulizer|
    GB2508558A|2014-03-17|2014-06-04|Anthony Gibbons|Forming a perforate membrane by laser and reaming|
    EP3146090B1|2014-05-23|2018-03-28|Stamford Devices Limited|A method for producing an aperture plate|US9719184B2|2010-12-28|2017-08-01|Stamford Devices Ltd.|Photodefined aperture plate and method for producing the same|
    CN104350182B|2012-06-11|2020-04-21|斯坦福设备有限公司|Method for producing an orifice plate for a nebulizer|
    EP2886185A1|2013-12-20|2015-06-24|Activaero GmbH|Perforated membrane and process for its preparation|
    EP2947181B1|2014-05-23|2017-02-22|Stamford Devices Limited|A method for producing an aperture plate|
    EP3146090B1|2014-05-23|2018-03-28|Stamford Devices Limited|A method for producing an aperture plate|
    ES2894741T3|2015-06-10|2022-02-15|Stamford Devices Ltd|aerosol generation|
    KR101953970B1|2016-06-29|2019-03-05|동국대학교 경주캠퍼스 산학협력단|Manufacturing method of microporous filter for aerosol generating nebulizer and microporous filter by using thereof|
    CN113909844A|2017-12-14|2022-01-11|斯坦福设备有限公司|Mounting of an aerosol generator orifice plate to a support|
    JP6973051B2|2017-12-26|2021-11-24|株式会社リコー|Liquid discharge head, liquid discharge unit, device that discharges liquid|
    JP2021523824A|2018-05-16|2021-09-09|フィリップ・モーリス・プロダクツ・ソシエテ・アノニム|Two-layer mesh element for atomizer assembly|
    US11173258B2|2018-08-30|2021-11-16|Analog Devices, Inc.|Using piezoelectric electrodes as active surfaces for electroplating process|
    CN113301979A|2019-01-07|2021-08-24|株式会社村田制作所|Filtering and filtering device|
    CN110055567B|2019-04-18|2021-05-07|中国科学院化学研究所|Electrodeposition preparation method of microporous membrane material, microporous membrane material and application thereof|
    WO2021191160A1|2020-03-24|2021-09-30|Stamford Devices Limited|A vibrating aperture plate nebulizer|
    US20220016360A1|2020-07-14|2022-01-20|Stamford Devices Limited|Vaccine administration apparatus and single dose chambers|
    法律状态:
    2018-01-23| B11A| Dismissal acc. art.33 of ipl - examination not requested within 36 months of filing|
    2018-02-14| B15V| Prolongation of time limit allowed|
    2018-03-06| B11N| Dismissal: publication cancelled|
    2018-03-13| B06F| Objections, documents and/or translations needed after an examination request according art. 34 industrial property law|
    2019-09-17| B06U| Preliminary requirement: requests with searches performed by other patent offices: suspension of the patent application procedure|
    2020-09-08| B06A| Notification to applicant to reply to the report for non-patentability or inadequacy of the application according art. 36 industrial patent law|
    2020-12-29| B09A| Decision: intention to grant|
    2021-01-19| B16A| Patent or certificate of addition of invention granted|Free format text: PRAZO DE VALIDADE: 20 (VINTE) ANOS CONTADOS A PARTIR DE 24/05/2013, OBSERVADAS AS CONDICOES LEGAIS. |
    优先权:
    申请号 | 申请日 | 专利标题
    US201261658054P| true| 2012-06-11|2012-06-11|
    US61/658,054|2012-06-11|
    PCT/EP2013/060803|WO2013186031A2|2012-06-11|2013-05-24|A method of producing an aperture plate for a nebulizer|
    [返回顶部]